OHARA CLEARCERAM®-Z (CCZ)

Glass Type: Glass Ceramics

Description

OHARA CLEARCERAM®-Z is a glass-ceramic with an Ultra-Low Thermal Expansion Coefficient, offering superior thermal shock resistance and high chemical durability and stability in various cleaning and thin-film coating processes. Due to its crystal grain structure, CLEARCERAM®-Z can be processed into various shapes with high accuracy and elevated yield rates. This material is an ideal alternate to quartz glass, ceramics, or low thermal expansion alloys.

There are two versions of CLEARCERAM®-Z available based on thermal expansion differences: CCZ Regular and CCZ-HS.  CCZ Regular offers lower thermal expansion across a wide temperature range, while the CCZ-HS offers lower thermal expansion near room temperature.

CLEARCERAM®-Z can be used for semiconductor stepper components, optical flats, interferometer components, laser refraction mirrors and suspensions, astronomical telescope mirrors, and pedestals for precision equipment, among others.

Thermal PropertiesMechanical Properties
Thermal Coefficient of Expansion - Regular(0-50°C): 0.0±1.0×10 - 7 /˚CDensity - Regular2.55 g/cm3
Annealing Point - RegularN/AKnoop Hardness - Regular600 Hk
Softening Point - RegularN/AYoung's Modulus - Regular90 Gpa
Strain Point - RegularN/APoisson's Ratio - Regular0.25
Chemical PropertiesElectrical Properties
Hydrolytic Resistance JOGIS RW - RegularClass 2Dielectric Constant - Regular8.39
Acid Resistance RA - RegularClass 1Resistivity 300°C in Ω·cm - Regular1.0·10^8
Alkali Resistance Ralk - Regular0.25%Dielectric Strength - RegularN/A
Optical Properties
Refractive Index nD - Regular1.54607